SiC功率器件制造工艺特点与核心装备创新进展Manufacturing process characteristics and key equipment development of SiC power devices巩小亮中国电子科技集团公司第四十八研究所 半导体装备研究部副主任GONGXiaoliang Deputy director of Semiconductor equipment research department, the 48th Research Institute of China Electronics Technology Group Corporation

本期嘉宾无锡邑文电子科技有限公司总经理廖海涛为大家带来《半导体装备主题报告（一）半导体二手装备市场评估与翻新标准化》