用于蓝绿光Mini/Micro-LED生产的MOCVD新型装备Blue/Green Mini and Micro-LEDs Grown on Large Size Substrates for Advanced Display Applications陈耀中微公司MOCVD工艺总监Yao CHENDirector of MOCVD Process Technology，Advanced Micro-Fabrication Equipment Inc. China

为了使基于AlGaN材料的深紫外LED能够更广泛地应用于固化、水和空气的净化及医疗消毒等各方面，必须要大幅地降低其成本。提高深紫