MPCVD法金刚石同质外延生长及MOS器件技术Homogeneous epitaxial diamond growth by MPCVD and its MOS device technology张金风西安电子科技大学教授ZHANG JinfengProfessor of Xidian University
SiC MOS器件氧化后退火新途径低温再氧化退火技术A new approach of post-oxidation annealing for SiC MOS devices -- the low-temperature re-oxidation annealing technology王德君大连理工大学教授Wang DejunProfessor of Dalian University of Technology