SiC单晶的坩埚结构及PVT生长工艺条件的改进

SiC Single Crystals with Modification of Crucible Structure and Process Condition for PVT Growth

Won-Jae LEE——韩国东义大学教授、釜山电力半导体研究所所长

Won-Jae LEE——Professor of Dong-Eui University, Director of Busan Power Semiconductor Lab.