GaN基光电材料外延与MOCVD反应腔结构关联性研究

Research on the Correlation Between GaN-based Optoelectronic Material Epitaxy and MOCVD Reactor Chamber Structure

姚威振——中国科学院半导体研究所副研究员、中科重仪半导体联合创始人

YAO Weizhen——Associate Professor of Institute of Semiconductors, Chinese Academy of Sciences, Co-founder of CASInstruments Semiconductor Co., Ltd.