利用高Al组分β-(AlGa)2O3缓冲层在蓝宝石衬底上优化生长高质量β-Ga2O3厚膜

Growth of high quality β- Ga2O3 thick film on sapphire by using high Al content β- (AlGa)2O3 buffer layer

张赫之——大连理工大学副教授

ZHANG Hezhi——Associate professor of Dalian University of Technology