SiC功率器件制造工艺特点与核心装备创新进展

Manufacturing process characteristics and key equipment development of SiC power devices

巩小亮——中国电子科技集团公司第四十八研究所 半导体装备研究部副主任

GONG Xiaoliang— Deputy director of Semiconductor equipment research department, the 48th Research Institute of China Electronics Technology Group Corporation