张峰：Atomic layer deposition of AlN on 4H-SiC_WBSC 2021_视频

张峰：Atomic layer deposition of AlN on 4H-SiC

2022-01-05 播放:219

“Atomic layer deposition of AlN on 4H-SiC”

Author: Feng Zhang, Zhanwei Shen, Jun Chen

Institute: Xiamen University, Institute of Semiconductors, Chinese Academy of Sciences