Author: Ye Yuan, Shangfeng Liu, Lijie Huang, Jin Zhang, Tai Li, Junjie Kang, Wei Luo, Xiaoxiao Sun, Zhaoying Chen, Yongde Li, Houjin Wang, Weiyun Wang, Jason Hoo, Long Yan, Shiping Guo and Xinqiang Wang
Institute: Songshan Lake Materials Laboratory, Peking University, Advanced Micro-Fabrication Equipment Inc.