碳化硅生长和衬底建模以及基于MOVPE技术的氮化镓生长模拟 Modeling of SiC crystal growth and epitaxy and simulation of GaN metal Organic Vapor Deposition Andrey SMIRNOV 俄罗斯STR Group, Inc.资深研发工程师 Andrey SMIRNOV Senior Research Engineer of STR Group, Inc., Russia