同步辐射X射线衍射法实现氮化镓衬底及同质外延薄膜晶格面倾斜可视化 Synchrotron x-ray diffraction-based visualization of lattice-plane tilting of a GaN substrate and epitaxial film 坂田修身日本国立材料研究所SPring-8 BL15XU线站站长，东京工业大学兼职教授 Osami SAKATAStation Director of the Synchrotron X-ray Station at SPring-8 and the Group Leaders of the Synchrotron X-ray group and the Synchrotron X-ray Characterization group, National Institute for Materials Science (NIMS); Adjunct Professor at the Tokyo Institute of Technology, Japan